In HVAC systems, the ability to monitor volumetric flow rates and pressures in lines and rooms is decisive when it comes to operating heating, ventilation, and air-conditioning systems efficiently and economically. Pressure sensors are a central element for controlling the systems. To ensure compliance with strict legal requirements and to minimize energy costs, ever-decreasing measuring ranges as well as greater measuring sensitivities, accuracies, and long-term stabilities of the sensors are required. In addition, the pressure sensors must cope with particular requirements in HVAC systems, such as dust-laden air, and must be small and easy to integrate in OEM systems.